Model Selection Method

Booka has been focusing on vacuum technology for 30 years,booka vacuum products are
produced using imported raw materials and advanced manufacturing processes

Handling of semiconductor chips

Selected condition：
①Workpiece: semiconductor chip
Size：8mm×8mm×1mm、Quality：1g
②Vacuum side piping length：1m
③Sucking response time：300msec the following

1.Selection of vacuum chucks
W=lg=0.0098N
S=π/4×(0.4) =0.13cm
t=4(Horizontal hanging)
①by the size of the workpiece, the diameter of the suction cup is 4mm (1)
From the calculation results, it is judged that the workpiece can be sucked at a degree of vacuum of +3.0 kPa or more.
3 by the shape and type of the workpiece Selection of suction cup shape: flat type Suction cup material: silicon
4 From the above results, the model number of the vacuum chuck is VPA40VFS-□□.(vacuum take-out □□, determined by the installation state of the suction cup)

2.Selection of vacuum generator

① Find the vacuum side piping volume.
Assume that the inner diameter of the pipe is 2 mm and the pipe volume is .
V=π/4×D×1/1000=π/4×2
×1×1×1/1000
=0.0031L
② No leakage (QL) when sucking, the average suction flow rate of the sorption response time is obtained by the calculation formula of the above.
Q=(V×60)/T1+QL=(0.0031×60)/0.3+0=0.62L

According to the calculation formula of the foregoing, the maximum suction flow rate Qmax is

Qmax=(2~3)×Q=(2~3)×0.62
=1.24~1.86 L/min(ANR)

From the maximum suction flow rate of the vacuum generator, it is judged that the nozzle diameter of 0.5 can be used.

(In accordance with the conditions of use, determine the full model of the vacuum generator used.)

3.Smoking response time confirmation

The response time is confirmed by the characteristics of the selected vacuum generator.

① Because the maximum suction flow rate of the vacuum generator 5L/min, the calculation formula of the previous 18, the average suction flow rate Q1 is

Q1=(1/2~1/3)×maximum suction flow rate of vacuum generator

=(1/2~1/3)×5=2.5~1.7L/min

② Next, the maximum flow rate Q2 is obtained according to the piping. The conductance C of the piping is determined by the selected Fig. 3, C = 0.22.

According to the calculation formula of the previous 18, the maximum flow rate of the piping is as follows

Q2=5×C×11.1=5×0.22×11.1=12.2L/min

③Because Q1 is smaller than Q2, choose Q=Q1

Therefore, the sorption response time is calculated by the previous 18

T=(V×60)/Q=(0.0031×60)/1.7=0.109 seconds

=109msec

Confirm that the required specifications meet 300msec.